| 摘要 |
A section heating vacuum reactive furnace for rapid heat treating equipment is composed of (A) upper stainless steel sheet (3) combined with upper part of upper quartz window (5) by arraying tungsten halogen lamp (1), (2) into crossed two layers, (B) a reactive furnace wall (6) of anode oxidized aluminum sheet, (C) reacting chamber composed of the upper quartz window (5) and the lower stainless steel sheet (8), (D) O-ring (4), (7) inserted into the space between the upper stainless steel sheet (3) and the upper quartz window (5) and/or reactive furnace wall (6), to prevent demage of upper quartz window (5) under high vacuum, and (E) cooling water passway (12) maintaining the temperature of the wall surface at less than 100 deg.C to prevent deposition.
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