| 摘要 |
<p>PURPOSE:To efficiently remove harmful alkyl hydride compounds such as tert- butyl arsine and tert-butyl phosphine used in the process of manufacturing a semiconductor, etc., and contained in exhaust gases, etc. CONSTITUTION:Harmful components are removed from the gas containing alkyl hydride compounds by contacting a purifying agent having cobalt (II) compound added thereto with a metal oxide consisting mainly of copper oxide (II) and manganese oxide (IV).</p> |
