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发明名称
摘要
申请公布号
JP2561008(B2)
申请公布日期
1996.12.04
申请号
JP19930296494
申请日期
1993.11.26
申请人
NIPPON ELECTRIC CO
发明人
SUGYAMA SATOSHI
分类号
H01L21/28;H01L21/3205;H01L21/3213;(IPC1-7):H01L21/320;H01L21/321
主分类号
H01L21/28
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代理人
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