发明名称 Apparatus for drawing monocrystals from melt in crucible
摘要 The apparatus includes a shaft (22) for drawing the crystal (8) from the melt under vacuum into an airlock chamber (5) which is horizontally pivotable. The shaft bearing block (55) is provided with an elastically deformable unit, for example, bellows (53) with a flange (56) for pressure-tight top closure of the chamber (5). The wire-pull (52) in the metal hose (57) fixed to the bearing block (55) is attached to the free end of a pivotable lever (51) with a stationary mounting. The wire-pull (49) in the metal hose (50) is attached to a middle region of the lever (51), and serves for vertical displacement of an arm (34) carrying the chamber (5).
申请公布号 DE19629829(A1) 申请公布日期 1998.01.29
申请号 DE19961029829 申请日期 1996.07.24
申请人 LEYBOLD SYSTEMS GMBH, 63450 HANAU, DE 发明人 SCHOLLER, JOHANN, 64859 EPPERTSHAUSEN, DE
分类号 C30B15/00;C30B15/30;(IPC1-7):C30B15/10 主分类号 C30B15/00
代理机构 代理人
主权项
地址