MICROPROCESSING METHOD USING SUPER-HIGH RESOLUTION

摘要

PROBLEM TO BE SOLVED: To make it possible to execute processing of a microregion of nanometer to micrometer order with a high energy density by using a super-high technique of light and condensing the light to its wavelength or below. SOLUTION: A space frequency of light is divided in an optical device 2 for division and these divided components are synthesized by interference at a condensing point 4 on a workpiece 3 and are imaged as the light having the high energy density with high condensability. As a result, the processing of the microregion from nanometer to micrometer order is made possible.