PLASMA RESISTANT MEMBER AND METHOD FOR MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a plasma resistant member which sufficiently withstands exposure of a low-pressure high-density plasma, and a method for manufacturing the same. SOLUTION: This plasma resistant member substantially consists of a sintered yttrium aluminate garnet compact and is >=70 in the color difference in an L*a*b* color specification system at surface roughness (Ra) of <=0.01 μm. The manufacturing method has a process 4 subjecting an yttrium aluminate garnet molding to calcining and degreasing treatment, a process for blackening the molding subjected to the calcining and degreasing treatment by introducing defects into the oxygen ion site in the crystal by vacuum sintering of the molding and a process for whitening the sintered compact subjected to the blackening by heat treating the sintered compact at 1,400 to 1,900 deg.C in an atmosphere to bond the oxygen to the oxygen defect ion site in the crystal.