INDEXER FOR SEMICONDUCTOR FACILITIES

摘要

PURPOSE: An indexer for the semiconductor facilities is provided to stably form a gas film on a wafer and to easily carry out the replacement and the repair by separately forming a wafer placing part with ceramic and preventing the thermal deformation of the wafer. CONSTITUTION: The indexer transfers the wafer to a pedestal as a position forming the gas film by installing in the inner part of a process chamber. The indexer comprises a base member separatively combined with the hub of a spindle assembly and plural ceramic placing members radially combined with the base member. One end of the placing member is separatively combined with the base member and the other end has a placing groove placing the wafer. A plurality of screws for controlling the wafer level are joined to the placing groove of the placing member. A tool joining the placing member to the base member is a bolt.