发明名称 NOZZLE FOR THINNING OF PHOSPHINE
摘要 PROBLEM TO BE SOLVED: To provide a nozzle for thinning of phospshine(PH3 ) by gas, more preferably air, without danger, which nozzle is easily transportable and is rapidly usable in all desired places of use as a convenient device. SOLUTION: The nozzle for thinning of the phospshine consists of a tubular air guide section (6) having an annular spacing (2) and/or having a small tube as a PH3 guide section attached to at least one side and the thickness of the spacing opening and/or the size of the opening of the small tube is maximum 1/25 of the diameter of the tubular inhalation guide section (6) and/or maximum 1/25 of the spacing between the surface of an air guide element (8) and the tubular air guide section (6) of the region of a PH3 inlet.
申请公布号 JP2002320882(A) 申请公布日期 2002.11.05
申请号 JP20020028130 申请日期 2002.02.05
申请人 HORN FRANZISKUS 发明人 HORN FRANZISKUS
分类号 B05B7/04;B01F3/02;B01F5/04;B05B1/06;(IPC1-7):B05B7/04 主分类号 B05B7/04
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