发明名称 GaP EPITAXIAL WAFER AND GaP LIGHT EMITTING ELEMENT
摘要 <P>PROBLEM TO BE SOLVED: To provide a GaP epitaxial wafer which can provide higher luminance and a GaP light emitting element using the same wafer. <P>SOLUTION: In this GaP epitaxial wafer 3, an n-type GaP buffer layer 11 is formed on the plane ä111}B of an n-type GaP single crystal substrate 10. The number of comb type crystal defects which are observed at the n-type GaP buffer layer 11 when the ä01-1} cleaved surface is selectively etched and extending crossing with the growth interface of the n-type GaP buffer layer 11 is 30 or less per 100 &mu;m at the growth interface. The GaP light emitting element 1 manufactured using this GaP epitaxial wafer 3 assures higher luminance. <P>COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005236048(A) 申请公布日期 2005.09.02
申请号 JP20040043535 申请日期 2004.02.19
申请人 SHIN ETSU HANDOTAI CO LTD 发明人 NAKAMURA AKIO;MOGI ISAMU;YOSHIDA YUJI
分类号 H01L21/208;H01L33/12;H01L33/30 主分类号 H01L21/208
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