发明名称 |
GaP EPITAXIAL WAFER AND GaP LIGHT EMITTING ELEMENT |
摘要 |
<P>PROBLEM TO BE SOLVED: To provide a GaP epitaxial wafer which can provide higher luminance and a GaP light emitting element using the same wafer. <P>SOLUTION: In this GaP epitaxial wafer 3, an n-type GaP buffer layer 11 is formed on the plane ä111}B of an n-type GaP single crystal substrate 10. The number of comb type crystal defects which are observed at the n-type GaP buffer layer 11 when the ä01-1} cleaved surface is selectively etched and extending crossing with the growth interface of the n-type GaP buffer layer 11 is 30 or less per 100 μm at the growth interface. The GaP light emitting element 1 manufactured using this GaP epitaxial wafer 3 assures higher luminance. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
申请公布号 |
JP2005236048(A) |
申请公布日期 |
2005.09.02 |
申请号 |
JP20040043535 |
申请日期 |
2004.02.19 |
申请人 |
SHIN ETSU HANDOTAI CO LTD |
发明人 |
NAKAMURA AKIO;MOGI ISAMU;YOSHIDA YUJI |
分类号 |
H01L21/208;H01L33/12;H01L33/30 |
主分类号 |
H01L21/208 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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