| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an electromagentically driven angular velocity sensor having a high performance, improved sensitivity and a widened bandwidth, by enabling both the effective length of an electrode on a weight and the length of a support beam supporting the weight to a support body to be lengthened, and by lightening the weight of the sensor. <P>SOLUTION: The weight 20 in the form of the alphabet X which is made up by combining four elongated plate-like sections 21, is arranged on the inside of the square support body 10 so that its respective end sections are in close proximity to four corners of the support body 10 to form diagonal lines of the support body 10. A pair of zigzag-shaped support beams 30 is disposed in a space formed between the support body 10 and the weight 20 to connect them, and a driving electrode 50A, a monitoring electrode 50B, and detecting electrodes 50C, 50D are formed on a area ranging from one support beam 30 to the other support beam 30 through the weight 20. Each electrode on the weight 20 is arranged at the end section of the plate-like section 21 to lengthen the effective length as much as possible, and the weight 20 is configured in the form of the alphabet X, thereby lightening the weight of the sensor. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
