| 摘要 |
An inexpensive, robust plasma discharge emitter that repeatably creates a patterned charge on a substrate. To facilitate highly accurate charge deposition, each emitter contains a plasma well for confining the plasma within the emitter. Additionally, a plurality of emitters are arranged in an array to provide a practical charge patterning device. Furthermore, to fabricate an emitter or an array of emitters, a relatively low-cost, repeatable method of fabrication is used that relies upon conventional integrated circuit fabrication techniques. |
