| 摘要 |
A substrate transfer method using vacuum adsorption is provided to absorb a pressure gradient pressed on the substrate by elevating the substrate in a state when a first substrate is separated from a second substrate. A plurality of substrates are stacked, and the top substrate can be transported by pickers of a first group(122a,122b,122c,122d) and a second group which have a vacuum adsorption function. At a first step, the picker of the first group elevates the top substrate by absorbing a first region of the substrate using the vacuum. At a second step, the picker of the second group elevates the substrate by absorbing a second region of the substrate using the vacuum. At a third step, the substrate is elevated and transported.
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