Vorrichtung zur Herstellung oxidischer Dünnschichten
摘要
The invention relates to an apparatus for the production of thin oxide coatings, having a vacuum chamber wherein an oxygen chamber with an opening and a rotary substrate holder overlapping the latter are disposed. For the rotary arrangement of the substrate holder a rotary mounting is provided, which engages a circumferential portion of the substrate holder.
申请公布号
DE19680845(D2)
申请公布日期
1999.03.18
申请号
DE1996180845D
申请日期
1996.11.01
申请人
THEVA DUENNSCHICHT GMBH, 85354 FREISING, DE;KINDER, HELMUT, PROF. DR., 85354 FREISING, DE