APPARATUS AND METHOD FOR DRYING A SUBSTRATE

摘要

A system for drying a work piece is provided. The system includes a chamber containing a cleaning fluid in a first portion of the chamber and a drying region. The system includes a wet transition arm configured to support a plurality of work pieces while disposed in the cleaning fluid. A dry transition arn configured to accept the plurality of work pieces from the wet transition arm as the wet transition arm is being raised is also included. The dry transition arm and the wet transition arm are coupled to a common drive mechanism, wherein the common drive mechanism includes a first and a second motor. The first motor is configured to drive both the wet and dry transition arms. The second motor is configured to control an amount of separation between the wet and dry transition arms. A transition arm and method for drying a work piece are provided.