| 摘要 |
PROBLEM TO BE SOLVED: To provide an atmosphere opening method of a treatment container capable of opening the treatment container into the atmosphere with less generation of hazardous gas such as HF even when a byproduct consisting of metal fluoride is deposited in the treatment container. SOLUTION: In the atmosphere opening method of the treatment container for opening the treatment container with a metal fluoride deposited thereon into the atmosphere by performing the predetermined processing therein, a first operation is repeated a plurality of times, in which the atmosphere is introduced in the treatment container, the metal fluoride is reacted with water in the atmosphere for the sufficient time therefor, and the atmosphere is exhausted. Thereafter, a second operation is repeated a plurality of times, in which the atmosphere is introduced in the treatment container, and exhausted to discharge the reaction product mainly generated by the first operation. COPYRIGHT: (C)2008,JPO&INPIT
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