| 摘要 |
FIELD: physics, measuring. ^ SUBSTANCE: invention concerns noncontact examinations of a surface of metals and semiconductors optical methods. Device contains radiant of laser radiation smoothly reconstructed on frequency, the solid-state sample with a flat surface and an explored stratum on it, a device of transformation of volume radiation (VR) in the superficial electromagnetic wave (SEW) and back, a photointake, reformative VR in an electrical signal, and the block of processing of observed datas. The device of VR in SEW transformation also is back executed as a single whole in the form of the transparent plane-parallel plate with an oblique end face. The plate the facet converted to the sample, is located in the SEW field parallelly the surface of the sample apart from it not less than 10lambda where lambda a radiation wave length in vacuo, and has length along the SEW track not less than length of SEW distribution. Photointake is executed in the form of a ruler of photodetectors and disposed on the upper facet of a plate. ^ EFFECT: cutting of time of measurings and making of possibility for the coordination of length of SEW distribution with the size of surface of the sample. ^ 1 dwg |
