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发明名称	DEVICE AND METHOD FOR TREATMENT
摘要
申请公布号	EP1361604(B1)	申请公布日期	2009.03.18
申请号	EP20020716335	申请日期	2002.01.22
申请人	TOKYO ELECTRON LIMITED	发明人	KATO, YOSHIHIRO;GOTO, TADASHI;YOSHITAKA, HIKARU;AOKI, MAKOTO
分类号	C23C16/455;C23C16/32;C23C16/34;C23C16/36;C23C16/40;C23C16/44;H01J37/32	主分类号	C23C16/455
代理机构		代理人
主权项
地址

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