| 摘要 |
PROBLEM TO BE SOLVED: To provide a film deposition apparatus capable of closely contacting the outer peripheral surface of a can roll with a long film to efficiently cool the long film without excessively increasing a tension.SOLUTION: A film deposition apparatus 50 comprises: a feeding roll 52 and a winding roll 64 provided in a vacuum chamber 51; a can roll 56 having a cooling function and provided in the conveying path of a long film F defined between the feeding roll and the winding roll; and sputtering cathodes 57-60 provided so as to face the outer peripheral surface of the can roll 56 in order to deposit a film on the surface of the long film F. Power supply means for charging the long film F is provided in the conveying path. The can roll 56 has a portion covered with an insulating film 56a and contacted with the long film F on the outer peripheral surface and has a charging mechanism for charging the can roll with a potential different from a potential due to the charging of the long film F so as to adsorb the long film F.SELECTED DRAWING: Figure 1 |
