| 摘要 |
PROBLEM TO BE SOLVED: To provide a vertical operation type probe card eliminating the need of soldering work of a probe to a probe substrate.SOLUTION: A probe card includes a probe substrate having a large number of joint pads, a probe supporting body and a plurality of probes. The supporting body has first and second plates disposed in parallel at an interval, and each plate is formed with a probe guide hole. Each probe is equipped with one set of linear portions, and a coupling portion between both linear portions. An end surface of one linear portion opposes to the joint pad corresponding through the guide hole of the first plate. A terminal of the other linear portion penetrates the guide hole of the second plate as a needle tip. At the other linear portion, a stopper is formed, which abuts on an inner edge of the guide hole of the second plate so as to press-contact a base end of the probe on the joint pad and elastically deforms the coupling portion. At the guide hole of the second plate, a rotation preventive portion for preventing rotations of the probe is formed. |
