| 摘要 |
PROBLEM TO BE SOLVED: To improve the resolution of a sensor especially for realizing high precision test at a low cost, in an X-ray test equipment to be used in a factory or the like. SOLUTION: Fluororescent substance cells 3 are arranged in a cell structure fluororescent substance conversion part 1, and picture elements 4 are arranged in a photoelectric conversion part 2. The conversion part 1 converts X-ray into light, which is led out as an image signal in the photoelectric conversion part 2. The fluorescent substance cells 3 in the conversion part 1 are position- aligned to the picture elements 4 in the photoelectric conversion part 2 by one-to-one correspondence, so that the light of one fluororescent substance cell 3 is inputted in one corresponding picture element 4. By constituting the fluororescent substance cell structure and assigning the cell to the picture element, a sensor having high resolution of picture element units can be obtained. |
