发明名称 Molding structure for wafer level package
摘要 Apparatus, and methods of manufacture thereof, in which a molding compound is formed between spaced apart microelectronic devices. The molding compound comprises micro-filler elements. No boundary of any of the micro-filler elements is substantially parallel to a substantially planar surface of the molding compound, or to a substantially planar surface of any of the microelectronic devices.
申请公布号 US9401337(B2) 申请公布日期 2016.07.26
申请号 US201414222423 申请日期 2014.03.21
申请人 Taiwan Semiconductor Manufacturing Company, Ltd. 发明人 Yu Chen-Hua;Liu Chung-Shi;Huang Chih-Fan;Lin Chih-Wei;Lin Wei-Hung;Cheng Ming-Da
分类号 H01L21/00;H01L23/00;H01L23/31;H01L21/56 主分类号 H01L21/00
代理机构 Slater Matsil, LLP 代理人 Slater Matsil, LLP
主权项 1. A method, comprising: forming a sacrificial layer over a plurality of microelectronic devices, including over an electrical contact of each microelectronic device, wherein the microelectronic devices are coupled together by a first substrate; separating the plurality of microelectronic devices from each other to form separated microelectronic devices; coupling the separated microelectronic devices to a second substrate; and forming a molding compound on the second substrate around each microelectronic device while leaving exposed an area of the sacrificial layer overlying the electrical contact of each microelectronic device.
地址 Hsin-Chu TW