发明名称 |
Molding structure for wafer level package |
摘要 |
Apparatus, and methods of manufacture thereof, in which a molding compound is formed between spaced apart microelectronic devices. The molding compound comprises micro-filler elements. No boundary of any of the micro-filler elements is substantially parallel to a substantially planar surface of the molding compound, or to a substantially planar surface of any of the microelectronic devices. |
申请公布号 |
US9401337(B2) |
申请公布日期 |
2016.07.26 |
申请号 |
US201414222423 |
申请日期 |
2014.03.21 |
申请人 |
Taiwan Semiconductor Manufacturing Company, Ltd. |
发明人 |
Yu Chen-Hua;Liu Chung-Shi;Huang Chih-Fan;Lin Chih-Wei;Lin Wei-Hung;Cheng Ming-Da |
分类号 |
H01L21/00;H01L23/00;H01L23/31;H01L21/56 |
主分类号 |
H01L21/00 |
代理机构 |
Slater Matsil, LLP |
代理人 |
Slater Matsil, LLP |
主权项 |
1. A method, comprising:
forming a sacrificial layer over a plurality of microelectronic devices, including over an electrical contact of each microelectronic device, wherein the microelectronic devices are coupled together by a first substrate; separating the plurality of microelectronic devices from each other to form separated microelectronic devices; coupling the separated microelectronic devices to a second substrate; and forming a molding compound on the second substrate around each microelectronic device while leaving exposed an area of the sacrificial layer overlying the electrical contact of each microelectronic device. |
地址 |
Hsin-Chu TW |