发明名称 Shaft-equipped heater unit and method for manufacturing shaft-equipped heater unit
摘要 A shaft-equipped heater unit includes a heater plate that heats an object to be heated placed thereon, and a shaft part that supports the heater plate, wherein the shaft part is formed by spraying material powder which constitutes the shaft part on the heater plate at a temperature lower than a melting point of the material powder by heated compressed gas.
申请公布号 US9414441(B2) 申请公布日期 2016.08.09
申请号 US201214119991 申请日期 2012.05.29
申请人 NHK Spring Co., Ltd. 发明人 Takahara Gou;Tachikawa Toshihiro;Miyahara Junichi
分类号 H05B3/10;F27D5/00;H01L21/67;H01L21/687;H05B3/68;H05B3/28;H05B3/12;C23C24/04 主分类号 H05B3/10
代理机构 Locke Lord LLP 代理人 Locke Lord LLP
主权项 1. A shaft-equipped heater unit comprising: a heater plate that heats an object to be heated placed thereon; and a shaft that supports the heater plate, wherein the shaft is formed by spraying, on a rear surface of the heater plate, material powder which constitutes the shaft on the heater plate at a temperature lower than a melting point of the material powder by heated compressed gas, and the material powder bites into the rear surface of the heater plate at an interface between the shaft and the rear surface of the heater plate.
地址 Yokohama-shi JP