Baseplate supporting pin and baseplate supporting device using the same

摘要

According to embodiments of present invention, a baseplate supporting pin is provided, which comprises: a pin body; a heating device embedded into the pin body; and a first control unit electrically connected to the heating device for controlling the heating device. Furthermore, according to embodiments of present invention, a baseplate supporting device is provided, which comprises: a baseplate support member; and a baseplate supporting pin, provided to ascend or descend through an opening formed in the baseplate supporting plate so as to support the baseplate thereon or place the baseplate on the baseplate support member, wherein the baseplate supporting pin comprises: a pin body; a heating device built in the pin body; and a first control unit electrically connected to the heating device for controlling the heating device. The baseplate supporting pin and the baseplate supporting device facilitate eliminating adverse effect caused by uneven heating of the baseplate.

主权项

1. A baseplate supporting pin, comprising a pin body, wherein the baseplate supporting pin further comprises:
a heating device built in the pin body, a cooling unit located in the pin body; and a first control unit electrically connected to the heating device for controlling the heating device; wherein the cooling unit comprises a cooling liquid duct, and the cooling liquid duct is arranged to be farther from the top end of the pin body than the heating device; wherein the cooling unit further comprises a cooling gas intake pipe and a cooling gas exhaust pipe; and wherein the distal end of the cooling gas intake pipe is provided with multi-orifice gas-expelling apparatus, which is a tubular structure with several air vents or a sprayer device with several air vents.