| 摘要 |
PROBLEM TO BE SOLVED: To provide a vertical wafer boat where the strut has a rectangular profile, and which is capable of forming a more uniform film, by making the deposition gas flow more uniform between the wafer supports, and suppressing the film thickness variation in the wafer surface.SOLUTION: In a vertical wafer boat 1 constituted of a strut 4 where a wafer support 4a for mounting a plurality of wafers is formed, and a top plate 5 and a bottom plate 6 for fixing the upper and lower parts of the strut 4, at least one strut 4 includes two strut parts 4b, 4c of rectangular profile, and a plurality of wafer supports 4a for connecting the two strut parts 4b, 4c, and mounting a wafer on the upper surface thereof.SELECTED DRAWING: Figure 6 |
