发明名称 MIRROR POLISHING DEVICE FOR WORK EDGE
摘要 PROBLEM TO BE SOLVED: To improve machining efficiency by providing work holding means holding and rotating disk-like works having chamfered outer peripheral edges on the surface and the back face and bringing the edges of the works into contact with multiple polishing drums simultaneously. SOLUTION: Three work holding means 12 are radially arranged at intervals of 120 deg. to surround the periphery of three polishing drums 11 on a rotary table 10 so that each work holding means 12 is located just in the middle between two adjacent polishing drums 11. Each work holding means 12 holds a disk-like work 1 having outer peripheral edges 1a, 1b chamfered at the angle θ on the surface and the back face, rotates it around the axis, and brings the outer peripheral edges 1a, 1b of the work 1 into contact with the work faces of two adjacent polishing drums 11 simultaneously.
申请公布号 JPH1190803(A) 申请公布日期 1999.04.06
申请号 JP19970264878 申请日期 1997.09.11
申请人 SPEEDFAM CO LTD 发明人 HAKOMORI SHIYUNJI
分类号 B24B9/00;B23Q7/04;B23Q39/04;B24B9/06;B24B27/00;B24B41/00;H01L21/304 主分类号 B24B9/00
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