| 摘要 |
PURPOSE:To obtain an Auger spectrum reflecting intrinsic components of a sample by moving slightly the measured sample in a plane vertical to the irradiation electron beam. CONSTITUTION:By the mechansim (for example, a manipulator) which sets a sample, which is provided in an Auger electron spectroscopic analysis unit, to a prescribed position, the sample is moved slightly to shift the irradiation point of irradiated electrons in measurement. The speed where the measured sample is moved slightly is dependent upon energy of irradiated electrons (irradiated electron beam current), the electron beam diameter, and the material of the sample, and is 0.5-2mm/min, desirably. |
