,申请号JP19850038780U-传众专利搜索

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发明名称
摘要
申请公布号	JPS61157328(U)	申请公布日期	1986.09.30
申请号	JP19850038780U	申请日期	1985.03.20
申请人		发明人
分类号	H01L21/30;G03F1/00;G03F1/14;G03F9/00;H01L21/027;H01L21/67;H01L21/68;(IPC1-7):H01L21/30	主分类号	H01L21/30
代理机构		代理人
主权项
地址

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