| 摘要 |
PURPOSE:To efficiently produce hyperfine particles having uniform particle diameter by providing an evaporation source of metal or ceramic, a specified holding means of the evaporation source, a beam transmitting window for laser beams, a vacuum tank, an exhausting means and a recovering means of ultrafine particles. CONSTITUTION:An evaporation source holder 2 rotating and rocking the evaporation source 1 is provided in a vacuum tank 3 and the evaporation source 1 of metal or ceramic is held thereon. Then laser beams 12 are converged in the vacuum tank 3 via a beam transmitting window 4 and applied to the evaporation source 1. At this time, the inside of the vacuum tank 3 is exhausted with an exhauster 8 and set at 10<-4>Torr degree of vacuum or set under the atmosphere of constant pressure by introducing reactive gas after exhaust. The evaporation source 1 absorbs laser beams 12 and is evaporated. The vapor evaporated in vacuum or the gaseous atmosphere is quenched, solidified and made to hyperfine particles. These hyperfine particles are allowed to flow through an exhaust port 6 and an exhaust pipe 7, trapped and recovered with a recovering apparatus 9 thereof. |
