Silicon single-crystal pull-up device

摘要

In a silicon single-crystal pull-up device a quartz glass melting crucible is provided for holding a molten silicon material, as is a cylinder for covering an outer surface of a cylindrical section of the melting crucible, a rotary shaft for rotating the melting crucible, and a melting crucible support which is provided separate of the cylinder and is attached to an upper end of the rotary shaft in order to support the melting crucible and the cylinder.