| 发明名称 |
Dry roughing pump having a gas film bearing |
| 摘要 |
The present invention relates to a cryopump having a gas bearing formed in a clearance seal between a piston and a cylinder. The gas bearing is formed by forcing pressurized gas from a gas plenum through orifices to the clearance seal.
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| 申请公布号 |
US4873913(A) |
申请公布日期 |
1989.10.17 |
| 申请号 |
US19860906741 |
申请日期 |
1986.09.12 |
| 申请人 |
HELIX TECHNOLOGY CORPORATION |
发明人 |
PRUITT, GERALD R.;BERTSCH, PETER |
| 分类号 |
F04B37/08;F04B39/04 |
主分类号 |
F04B37/08 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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