| 摘要 |
PURPOSE:To obtain an AIN substrate free from warpage and usable without applying mechanical polishing after calcination by placing a non-carbide substrate as a weight on a molded article of AIN added with a sintering assistant and placed in a vessel made of a non-carbide material, filling AIN powder into the vessel, calcining the content and further calcining in N2 gas stream. CONSTITUTION:An AlN molded article 8 is sandwiched between a pair of substrates 4 made of a non-carbide material in a calcination vessel 2 made of a non-carbide material and having a BN coating layer 1 on the inner wall. AIN powder 5 is filled in the vessel while applying the load of the substrate 4 to the molded article 8. The molded article 8 is subjected to primary calcination at 1700 deg.C and the obtained calcined AIN article T is put into a graphite vessel 6 and subjected to secondary calcination at 1800 deg.C in N2 gas stream under normal pressure to obtain the objective AIN substrate. |
