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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH02218132(A)
申请公布日期
1990.08.30
申请号
JP19890039660
申请日期
1989.02.20
申请人
NEC CORP
发明人
FUJII KOICHI;YAMAMOTO HIROMASA
分类号
H01L27/148;H01L21/265;H01L21/324
主分类号
H01L27/148
代理机构
代理人
主权项
地址
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