摘要 |
<p>High purity argon is obtained by a cryogenic adsorptive technique in which crude argon feed (147) containing 0.8 mol% oxygen or less and 0.5 mol% nitrogen or less generated by cryogenic air separation is initially subjected to cryogenic adsorption (210, 202) for effecting nitrogen removal and then further subjected to cryogenic adsorption (201, 202) for effecting removal of oxygen. By conducting cryogenic adsorption in this manner, essentially no supplemental refrigeration is required in the cryogenic adsorption steps. <IMAGE></p> |