| 摘要 |
<p>PURPOSE:To provide a thermal type rate-of-flow sensor, which can exert sufficient responsiveness for varying rate of flow. CONSTITUTION:An electric insulative film 3 is formed over the surface of a glass base 1 in the form of a long plate, and thereover a heater resistance 2 consisting of a Pt film is formed. A plurality of props 33 are formed within this insulative film in its part right under the heat emission part 21 of the heater resistance 2 so as to constitute a vacuum cavity 1a. The heat emitted from the heat emission part 21 is hindered from conduction to the base 1 owing to this cavity 1a, and chiefly released into the fluid flowing over the surface of the base 1. Accordingly the resistance value of the heater resistance 2 changes quickly in compliance with change in the rate of fluid flow, which enhances the sensor output responsiveness.</p> |
