| 摘要 |
PROBLEM TO BE SOLVED: To provide a coating thickness measuring device measuring the thickness of a film on a substrate by use of ultrasonic waves and an ultrasonic flaw detection device detecting flaws(e.g. cavities and separated parts, etc.), in a based by use of ultrasonic waves. SOLUTION: A plurality of ultrasonic oscillator units each comprising a ultrasonic wave retarding material 2 and an ultrasonic oscillator 1 are arranged one- or two-dimensionally to obtain arrays T1, T2 of ultrasonic probes. Ultrasonic pulse signals are sequentially allocated to the plurality of ultrasonic oscillator units of each of the arrays T1, T2 of ultrasonic probes by means of a time sharing switch 8, and the thickness of a coat is measured using the pulse signals reflected from the coat. The subjects of measurement, i.e., the coating thickness and flaws in a base, etc., can surely be detected over a very wide one- or two-dimensional range through a small number of measuring operations. |
