发明名称 ARRANGEMENT AND METHOD FOR IMPROVING VACUUM IN A VERY HIGH VACUUM SYSTEM
摘要 The invention concerns an arrangement for improving vacuum in a very high vacuum system (ultrahigh vacuum) comprising a metal chamber releasing gas at its surface, consisting of a coating deposited on at least almost the whole surface of the metal wall defining the chamber. The invention is characterised in that the coating further comprises at least an undercoat of non-evaporating getter deposited on said surface of the metal wall defining the chamber and, on this undercoat, at least a thin film of at least a catalyst selected among ruthenium and/or rhodium and/or palladium and/or osmium and/or iridium and/or platinum and/or an alloy containing at least one of those.
申请公布号 WO9837958(A1) 申请公布日期 1998.09.03
申请号 WO1998EP00978 申请日期 1998.02.20
申请人 ORGANISATION EUROPEENNE POUR LA RECHERCHE NUCLEAIRE;BENVENUTI, CRISTOFORO 发明人 BENVENUTI, CRISTOFORO
分类号 B01J3/00;C23C14/16;C23C14/56;C23C16/44;C23C28/02;C23C30/00;(IPC1-7):B01J3/00;H01J7/18 主分类号 B01J3/00
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