发明名称 Low vacuum vapor process for producing superconductor articles with epitaxial layers
摘要 A method for fabricating superconductor articles with an epitaxial layer is described. The method can be performed under conditions of relatively high pressure and low substrate surface temperature. The resulting epitaxial layers can demonstrate various advantageous features, including low pore density and/or inclusions with small average particle size diameter.
申请公布号 AU9320998(A) 申请公布日期 1999.04.12
申请号 AU19980093209 申请日期 1998.09.21
申请人 AMERICAN SUPERCONDUCTOR CORPORATION 发明人 LESLIE G. FRITZEMEIER;DAVID M. BUCZEK
分类号 C04B35/00;C30B23/02;C30B25/02;H01L39/24 主分类号 C04B35/00
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