发明名称 LASER CHAMBER WITH MINIMIZED ACOUSTIC AND SHOCK WAVE DISTURBANCES
摘要 A laser chamber (100) had angled reflectors (116, 118) that reflect acoustic and shock waves away from the laser discharge area (103) to minimize acoustic and shock wave disturbances. The angled reflector may have different configurations to assist in the dissipation of the acoustic and shock waves. For example, the angled reflector (116, 118) may have a modulated reflective surface, such as having grooves or holes defined within the surface. Further, the angled reflector (116, 118) may have a reflective surface with acoustic and shock wave absorbing properties. The reflective surface with absorbent properties may be a felt metal or have multiple layered porous surfaces. In addition, the walls of the laser chamber (100) may be modulated to assist in the dissipation of the acoustic waves and shock waves through absorption, scattering, and by generating interference within the reflected waves. Multiple layered porous surfaces may be used along the walls to absorb and scatter incident waves. The walls of the laser chamber (100) may also be covered with an acoustic and shock wave absorbing material, such as felt metal. In other embodiments, the walls of the laser chamber (100) are modulated with grooves (132), such as triangular or rectangular horizontal grooves, which scatter incident waves and generate interference within reflected waves.
申请公布号 WO9945614(A1) 申请公布日期 1999.09.10
申请号 WO1999US03784 申请日期 1999.02.22
申请人 CYMER, INC.;JUHASZ, TIBOR;UJAZDOWSKI, RICHARD, C.;BESAUCELE, HERVE, A.;OZARSKI, ROBERT, G.;AZZOLA, JAMES, H. 发明人 JUHASZ, TIBOR;UJAZDOWSKI, RICHARD, C.;BESAUCELE, HERVE, A.;OZARSKI, ROBERT, G.;AZZOLA, JAMES, H.
分类号 H01S3/038;H01S3/032;H01S3/036;H01S3/225;(IPC1-7):H01S3/22 主分类号 H01S3/038
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