| 摘要 |
PURPOSE: An image display device is to reduce optical noise caused by an initial tilt angle by forming an actuator of an AMA(actuated mirror array) module in a structure that a lower electrode, a deforming layer, an upper electrode and a supporting layer are sequentially stacked. CONSTITUTION: Beam is generated in a light source. A projection lens projects an image on a screen. An AMA module(118) has a pixel array comprising a mirror(300) and an actuator(290) formed below the mirror for deforming the mirror. When a maximum signal is applied to the actuator, the mirror reflects an incident beam out of the projection lens. The actuator comprises a lower electrode(260) to which an image signal is applied, a deforming layer(265) deposited on the lower electrode, an upper electrode(270) deposited on the deforming layer to which a bias signal is applied and a supporting layer(275) deposited on the upper electrode. The mirror is mounted on the supporting layer through a post(295). When a signal is applied to the actuator, the mirror arranged on the supporting layer tilts in a direction opposite to a direction in which the supporting layer is formed.
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