| 摘要 |
PROBLEM TO BE SOLVED: To provide a sheet holding-shifting device capable of reducing maximum amount of deviation of a pattern or the like to approximately 1/2 of the dimensional deviation even when the dimensional deviations caused by expansion and contraction are produced between sheets. SOLUTION: In a state where a first sheet S1 is installed, a first mark M1 and the center position of the M1 are detected. A mark reference position Om1, at which a proper mark center is to be positioned, and the amounts of deviation x1, x2 and y1, y2 of the Om1 from the center position are detected. Based on the detected values, the amount of displacement of a center position of a line connecting the mark M1 to a second mark Ml is determined, and the center of a sucking disk is moved to the center point. Further, a deviationθin the direction of rotation is corrected, and the first sheet S1 is sucked by the sucking disk. After that, when the center of the sucking disk is returned to an origin-position Oz1, the first sheet S1 is held by the sucking disk in a normal position.
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