Non-contact surface roughness measuring device

摘要

A non-contact surface roughness-measuring machine is provided which can avoid damage caused by collision with a workpiece and set a non-contact surface roughness probe at an appropriate position relative to a measurement surface of the workpiece. A non-contact surface roughness probe and a touch-signal probe are attached at a tip end of an arm of a coordinate measuring machine. A stylus of the touch-signal probe is protruded relative to a detection surface of the non-contact surface roughness probe, in which the protrusion amount is within an optimum distance of the non-contact surface roughness probe relative to the measurement surface. When the probes are brought close to the workpiece and the touch-signal probe detects contact, the non-contact surface roughness probe is set within the optimum distance relative to the workpiece.