| 摘要 |
PROBLEM TO BE SOLVED: To accurately perform focusing on a desired position within field at high speed in a microscope for a television camera. SOLUTION: Parallel laser beams are made incident on the optical path of the microscope and formed into an image on a sample surface, and returning light from the sample surface is made incident on a photodiode. A focus displacement direction and a focus displacement amount are detected from the incident light quantity of the photodiode so as to perform focusing point operation to move a lens or a sample in a focusing direction so as to correct it by the focus displacement amount. Meanwhile, the matching of the image of a position to be measured on the sample surface registered previously with a picked-up image is performed by processing the image from the television camera picking up the microscopic image of the sample surface in the midst of the focusing point operation, and a stage on which the sample is placed is moved so as to align a point to be measured with a focus point, whereby the microscope is automatically focused on an optional point within the field. |
