| 摘要 |
PROBLEM TO BE SOLVED: To align a non-flat mirror efficiently and with precision in a simple process, with a simple configuration. SOLUTION: There are provided a reference light unit 10 which leads out a reference laser beam L whose optical axis is set, and an optical axis unit 70 which adjusts the optical axis of the reference laser beam L and detects the optical axis and focal point of a reflected light La from a non-flat mirror 142 which is irradiated with the reference laser beam L. The optical axis unit 70 comprises first and second pinhole plates 74 and 76 provided with a prescribed interval, and they are provided with first and second fine pores 80 and 90.
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