| 摘要 |
PROBLEM TO BE SOLVED: To execute a degassing treatment under optimum conditions, irrespective of whether the wiring constitution or the like of a semiconductor device is different. SOLUTION: A semiconductor chip 10 is heated by a heater 3; an exhaust gas component inside a chamber 2 for degassing is detected; and according to the detection result of a four-terminal mass filter 5, the heater 3 is controlled by a heating controller 6.
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