| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a clean room for manufacturing a thin-film solar cell that can suppress manufacturing costs by arranging equipment suited for the manufacturing of the thin-film solar cell. <P>SOLUTION: In the thin-film solar cell manufacturing system, a plurality of pieces of process equipment are provided on a substrate conveyance path and a thin film is formed on the substrate through the process equipment as a thin-film solar cell panel, the respective process equipment are connected in series, and further a path (S-shaped snake line) having a turn is formed. A region 50 at one side of the conveyance path is set to be a main access surface and a passage to the process equipment. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
