Prober for testing substrate of e.g. semiconductor chip, has chuck with retaining surface to retain and cool substrate and fixed on carrier such that it is thermally uncoupled from another chuck and connected to cold head by connecting unit

摘要

The prober has a chuck (5) that is moved between a retaining area and a working area by a drive and includes holding unit to fix a substrate carrier. A chuck (6) with a retaining surface for retaining and cooling a test substrate is fixed on the carrier in such a manner that the chuck (6) is thermally uncoupled from the chuck (5) and connected with a cold head (23) of a refrigerator (24) by a good heat conducting connecting unit (22).