| 摘要 |
PROBLEM TO BE SOLVED: To provide a three-dimensional coordinate measurement device with which it is possible to suppress the deformation of a surface plate due to heat and make highly accurate measurement.SOLUTION: A groove 40 is formed in the right side of a stone surface plate 10 along the direction of axis Y, and a Y guide 42 for supporting a portal Y carriage between the groove 40 and the right-side face 10R of the surface plate 10 so as to be movable in the direction of axis Y. A support part is provided at the lower end on the right side of the Y carriage, the support part being supported by the Y guide 42 so as to be movable in the direction of axis Y. The front side face 10F and the rear side face 10E of the surface plate 10 are provided with heat insulation members 150, 152 covering the whole surfaces of these, shutting off the heat coming into the inside of the surface plate 10 and going out to the open air from the front side face 10F and the rear side face 10E of the surface plate 10.SELECTED DRAWING: Figure 6 |
