发明名称 ACCELERATION SENSOR AND METHOD FOR CONNECTING ITS ELECTRODE
摘要 PROBLEM TO BE SOLVED: To make Al wire bonding technique (ultrasonic bonding) applicable to the connection between a piezoelectric ceramic element and each terminal which has been considered conventionally as impossible. SOLUTION: An Ag-Pt conducting material is used as the conducting material of the electrodes 14 and 15 of a piezoelectric ceramic element 5. Therefore, the size of a sensor can be reduced by connecting thin Al wires 7', 7", 7"', and 7"" to the sensor, because the Al wire bonding technique can be applied to respectively connect the electrodes 14 and 15 to lead terminals 9 and 19.
申请公布号 JPH11160343(A) 申请公布日期 1999.06.18
申请号 JP19970324530 申请日期 1997.11.26
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 ASANO SHOGO;AOKI HARUMI;SEKINO HARUHIKO;SHIMAZAKI SHINJI;ODAJIMA TOMOHIRO
分类号 G01P15/09;H01L21/60;H01L41/08 主分类号 G01P15/09
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