摘要 |
PROBLEM TO BE SOLVED: To make Al wire bonding technique (ultrasonic bonding) applicable to the connection between a piezoelectric ceramic element and each terminal which has been considered conventionally as impossible. SOLUTION: An Ag-Pt conducting material is used as the conducting material of the electrodes 14 and 15 of a piezoelectric ceramic element 5. Therefore, the size of a sensor can be reduced by connecting thin Al wires 7', 7", 7"', and 7"" to the sensor, because the Al wire bonding technique can be applied to respectively connect the electrodes 14 and 15 to lead terminals 9 and 19. |