Oscillating quartz crystal layer thickness measuring device - has digital system comprising measurement crystal and oscillator

摘要

A measurement oscillator is connected to the crystal output. A rectangular signal shaper, a period measuring device and store are provided. A zero balancing unit at one input of the store is connected to the input of a difference former. The output of the latter is connected to a thickness indicator. A pulse frequency multiplier and a counter connected in series are inserted between the rectangular signal former and period measuring device. A thickness adjuster is connected to the multiplier's other input. The measurer is based on the periodic time change principle. It can be developed by using a speed measurer connected to the output of the difference former.