| 摘要 |
In a system for aligning successive configurations of minute semiconductors during manufacture, any selected configuration is carried on a precision X,Y, theta table, which is under the automatic control of (1) a standard television camera that is subject to conventional geometrical and shading distortions, (2) pattern-recognition and motor-control circuitry that corrects these distortions so that precision alignment is possible, and (3) a monitor including a television viewing screen for supervising the system.
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